Product category:
Electronics Manufacturing Materials and Consumables
News Release from: Advanced Diamond Solutions | Subject: ADD and ODD
Edited by the Electronicstalk Editorial
Team on 24 April 2006
Diamond disks are greener way to polish
wafers
Diamond pad conditioner consumables for the semiconductor wafer polishing industry are claimed to be the first to offer environmental friendliness.
Advanced Diamond Solutions has unveiled diamond pad conditioner consumables for the semiconductor wafer polishing industry that are the first to offer environmental friendliness At the April CMPUG Conference in Sunnyvale, California, Dr Michael Sung, Barnas Monteith and Dr James Sung presented a lecture entitled "PCD planers for dressing CMP pads: the enabling technology for manufacturing future Moore's law semiconductors"
This article was originally published on Electronicstalk on 10 Oct 2005 at 8.00am (UK)
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Sung offered data on two new products of Advanced Diamond Solutions, code-named Advanced Diamond Disk (ADD) and Organic Diamond Disk (ODD).
ADD is a sintered polycrystalline diamond (PCD) substrate conditioner, which is machine-shaped to offer a customer-specified grid of cutting tips with levelling of 20um or less - a significant improvement over industry norms.
ODD is an organic substrate disk, offering low costs, and oriented diamond grains.
Because of improvements in the substrate, tip shape, levelling and QC protocol, both products offer significant improvements in uniformity, defectivity, corrosion-protection and lifetime over current standards.
"For the first time, our PCD pad conditioners offer customers the option to return the used disks to ADS to be resharpened and reused, over and over again with no loss of substrate quality", stated Monteith.
"This not only significantly improves customer COO (cost of ownership) over time, but provides them a means of recycling a high volume consumable".
Previous stainless steel, ceramic and plastic pad conditioners are quite often discarded as trash; the small volume that is recycled must go through extensive and energy-inefficient melting and reclaim processes.
As semiconductor fabs look to become more energy and environment-friendly, this innovation is a critical step in the evolution of semiconductor manufacturing operations.
ADD and ODD further offer significant technological advances over previous conditioners, permitting customers to use the conditioners for low-pH slurries such as those used in Cu processes, as well as next generation CMP tools, enabling a path to node sizes of 45nm and smaller.
Advanced Diamond Solutions has recently released the products to market and is seeking customer-partners for process-specific qualifications.
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