Disks are ideal for Cu processes

ADS has announced the latest data from its new line of low cost CMP pad conditioners, at the 23rd International VLSI/ULSI Multilevel Interconnection Conference, this week.

ADS has announced the latest data from its new line of low cost CMP pad conditioners, at the 23rd International VLSI/ULSI Multilevel Interconnection Conference, this week.

Dr Michael Sung, of Advanced Diamond Solutions, has presented several new conditioners during the conference, in addition to multiple posters including new performance data.

Results indicate the new disks are ideal for Cu processes, in addition to traditional oxide, tungsten and other processes.

These conditioners, which use a much more efficient manufacturing process, as well as an epoxy base, are much lower cost than brazed or electroplated designs.

While several companies have recently released thermoplastic versions of CMP pad conditioners, these new Organic Diamond Disks are made with an innovative thermally stable, stiff epoxy.

By using an epoxy base with partly metal-coated diamonds, the disks are lighter, and a wider range of abrasive particle types can be used.

nondiamond materials such as CBN are also possible with this design.

Because no metal is exposed to the surface, the disks are ideal for harsh extreme pH slurries, and a wider range of operating temperatures.

"We are finding that when we speak with customers, our pricing is 20%, 30% or less than conventional electroplated disks out in the marketplace".

"Our disks also have the benefit of fixed placement grid-pattern diamonds, as well as optional oriented tips, to give predictable control over performance".

"They also have longer lifetimes, lower defectivity and superior uniformity results".

"Qualifying these disks is an easy decision for thin film and process engineers as well as fab managers", stated ADS' Product Manager.

The Organic Diamond Disk product line is an ideal complement to another newly release line of disks, Advanced Diamond Disk (ADD), which are environmentally friendly and made with pure polycrystalline diamond.

Organic Diamond Disks are now in full production, and are available for purchase at any volume requirement.

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