Ovens filter for cleaner air

A clean process oven offering high-performance HEPA filtration for processes where minimal contamination is essential has been introduced to Europe by Alliance Sales (Europe).

A clean process oven offering high-performance HEPA filtration for processes where minimal contamination is essential has been introduced to Europe by Alliance Sales (Europe).

The Despatch Industries LCC 2-14 recirculates airflow horizontally and the recirculated air is 100% HEPA filtered.

The LCC 2-14 clean room oven has a capacity of 396 litres and a maximum temperature of 260C.

The oven, which features a stainless-steel interior and exterior, is available in three different atmosphere configurations: inert atmosphere, Class A solvent atmosphere or air atmosphere.

The LCC meets CE and SEMI S2 standards.

Alliance Sales (Europe) is also unveiling for the first time in Europe the Despatch AST-1100 automated photoresist bake tool which is a thermal process tool designed for wafer processing of 300 or 200mm wafers.

The AST-1100 has been developed to increase throughput and eliminate handling errors while conserving valuable floor space.

The tool maintains uniformity of +/-1.0C within each wafer and throughout all 25 wafers in the thermal chamber at soak.

Alliance Sales (Europe) is responsible for sales and technical support in the UK, Scandinavia and Finland of Despatch Industries' wide range of ovens for front-end and back-end applications, including wafer annealing, curing, bonding, and burn-in of integrated circuits and other semiconductor devices.

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