Product category:
PCB Assembly Equipment and Tools
News Release from: Alliance Sales (Europe) | Subject: Products at Semicon Europa
Edited by the Electronicstalk Editorial
Team on 31 March 2003
Metrology tool leads the way at Semicon
Europa
A fast, accurate and simple-to-use metrology tool that is based on innovative weighing technology is to be unveiled for the first time in Europe at Semicon Europa 2003.
A fast, accurate and simple-to-use metrology tool that is based on innovative weighing technology is to be unveiled for the first time in Europe at Semicon Europa 2003 Featured by Alliance Sales (Europe) on the European Business Team stands 242 to 243 in Hall A2, the UK-developed Metryx Mentor tool represents a new generation in metrology science
This article was originally published on Electronicstalk on 11 Apr 2002 at 8.00am (UK)
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The tool uses software featuring advanced compensation algorithms to improve weighing accuracy by an order of magnitude compared with previous techniques.
Almost any process that results in a change in weight of a substrate will benefit from the tool.
Ideal for noncontact, nondestructive measurements on production wafers the Metryx Mentor tool can directly test or measure wafers.
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The tool is capable of throughputs of 75 wafers per hour and can be shared with other metrology systems.
The Mentor offers fully automatic cassette-cassette operation using industry standard 200 and 300mm open cassettes to allow measurements of the wafers before and after processing.
The tool is sensitive enough to distinguish k variations from small changes in deposition parameters.
For metal film applications the system can measure thicknesses down to atomic resolution levels for barrier layers.
The tool can also determine the anneal state in copper films not detectable by other methods.
Also featured on the European Business Team stand for the first time will be the Sagitta Centar platform for precision cross sectioning.
The automatic polisher offers rapid sample preparation for SEM and TEM inspection in one tool.
The system has an accuracy of 0.1um providing a quality method to cross-section semiconductor samples 'straight to the point'.
Automatically polishing any predefined target the Centar system enables the fast, successful preparation of samples.
Transmission electron microscope samples can be prepared in less than an hour with repeatability in reaching the same target.
During the polishing process, the fully automated system monitors the polishing rate and ensures reliable TEM sample preparation.
The sample preparation system also offers full control of the sample shape and prepares samples with thicknesses between 1 and 4um.
Another major product highlight on the European Business Team stand will be Plade's fully robotic wet bench with a six-axis robot that features interchangeable grippers to allow semiconductor manufacturers to process wafers of 3, 4, 6 and 8in diameters in the same wet bench.
The wet bench provides dry-in/dry-out processing.
Also featured on the stand will be refurbished semiconductor equipment supplied by Broadway Engineering Services Team (BEST) which is the premier equipment refurbishment company for Applied Materials equipment.
BEST's service capabilities are supported by Alliance Sales (Europe) and the European Business Team and cover Applied Materials' 5200/5300 Centura tools as well as other etch and deposition equipment.
Alliance Sales (Europe) and its European Business Team partners can supply many configurations of the Centura 5200/5300.
All of the systems can be custom built to the exact specifications required by a company's process parameters.
The service includes wafer size, chamber configurations, custom gas panel arrangements and the style of remote frame.
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