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Stand-Alone Instruments
News Release from: Hitachi High-Technologies (Electron Microscopy) | Subject: S-4800 FESEM
Edited by the Electronicstalk Editorial
Team on 25 June 2002
High-resolution FESEM for large samples
A new FESEM combines the resolution capabilities normally associated with in-lens instruments with the sample handling of more conventional FESEMs.
A new FESEM which combines the resolution capabilities normally associated with in-lens instruments with the sample handling of more conventional FESEMs has been added to its range by Hitachi High-Technologies The S-4800 FESEM features a new objective lens design and enhanced E X B filter technology to collect and separate the various signals from pure secondary electrons, compositional secondary electrons and backscattered electrons
This article was originally published on Electronicstalk on 28 Jun 2004 at 8.00am (UK)
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Microscope resolves to handle 8in wafers
The S-4800 FESEM from Hitachi High-Technologies represents a breakthrough in FESEM technology, offering resolution figures of 1.0nm at 15kV yet capable of handling specimens up to 8in diameter.
SEM gets a better image
Hitachi High-Technologies has made a number of improvements to its S-4700 field emission SEM, which give significantly better image quality, particularly at low accelerating voltages.
Additional detector brings enhanced imaging
The ultra-high-resolution in-lens S-5200 FESEM from Hitachi High-Technologies has been enhanced with an optional electron detector for imaging backscattered electrons at low accelerating voltages.
This new electron optical arrangement allows the instrument to offer superb resolution figures of 1.0nm at 15kV and 2.0nm at 1kV, comparable to many in-lens FESEMs.
To obtain the greatest benefit from these resolution capabilities, the S-4800 also features redesigned specimen stages and a dry pumping system using a turbomolecular pump to avoid contamination.
There is a choice of specimen stages for the S-4800.
The Type I stage offers x-y movements of 50 x 50mm together with comprehensive z and tilt capabilities.
The Type II stage is used in conjunction with an 8" diameter chamber and will accommodate even bigger samples with its 110 x 110mm x-y movement and increased z movement.
All five axes on this stage are motorised and operate under graphical software control.
The rugged design of these new stages eliminates any vibration to ensure that the user can make the most of the resolution capabilities.
The enhanced E X B filter technology brings four times greater collection efficiency for low energy backscattered electrons than the standard E X B filter system, ensuring the production of outstanding backscattered electron images at low accelerating voltages.
Other new features include a new graphical user interface with a 1280 x 1024 pixel display as standard, and a new economy mode, where parts of the instrument can be shut down when not in use, while maintaining the column vacuum using the ion pumps.
This can significantly reduce electricity consumption.
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