Microscope produces scanning transmission images

The S-5200 ultrahigh-resolution field emission scanning electron microscope can now be equipped with a transmission detector to allow scanning transmission images to be produced.

The S-5200 ultrahigh-resolution field emission scanning electron microscope (FESEM) from Hitachi High-Technologies Corp can now be equipped with a transmission detector to allow scanning transmission images to be produced.

With this combination, scanning transmission electron microscopy can be carried out at low accelerating voltages (around 30kV).

This configuration gives excellent contrast on low-density materials and samples composed from low atomic number elements.

This makes it particularly useful for studies of semiconductors.

The S-5200 has an in-lens geometry which brings ultrahigh resolution in secondary electron imaging mode.

The new transmission detector is positioned below a bright field aperture directly below the pole piece of the objective lens.

The system offers a resolution of 0.6nm at 30kV in STEM mode, with a maximum magnification of approximately 2 million times.

As the specimen is positioned inside the lens gap, normal geometry for both secondary electron imaging and X-ray collection is maintained.

The take-off angle for the optional energy dispersive X-ray (EDX) detector is 20 degrees.

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