Product category:
Stand-Alone Instruments
News Release from: Hitachi High-Technologies (Electron Microscopy) | Subject: S-4800 FESEM
Edited by the Electronicstalk Editorial
Team on 28 June 2004
Microscope resolves to handle 8in wafers
The S-4800 FESEM from Hitachi High-Technologies represents a breakthrough in FESEM technology, offering resolution figures of 1.0nm at 15kV yet capable of handling specimens up to 8in diameter.
The S-4800 FESEM from Hitachi High-Technologies represents a breakthrough in FESEM technology, offering resolution figures of 1.0nm at 15kV yet capable of handling specimens up to 8in diameter The instrument combines large sample handling capabilities with the image resolution normally associated with in-lens scanning electron microscopes (SEMs) and can be seen for the first time in the UK at Microscience 2004, 6th-8th July 2004
This article was originally published on Electronicstalk on 25 Jun 2002 at 8.00am (UK)
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High-resolution FESEM for large samples
A new FESEM combines the resolution capabilities normally associated with in-lens instruments with the sample handling of more conventional FESEMs.
SEM gets a better image
Hitachi High-Technologies has made a number of improvements to its S-4700 field emission SEM, which give significantly better image quality, particularly at low accelerating voltages.
Additional detector brings enhanced imaging
The ultra-high-resolution in-lens S-5200 FESEM from Hitachi High-Technologies has been enhanced with an optional electron detector for imaging backscattered electrons at low accelerating voltages.
Also on show will be the S-3600N variable pressure SEM, which will be on the PGT stand, H2.
The S-3600N is characterised by its extremely large specimen chamber and sampling handling capabilities.
The outstanding resolution of the S-4800 is achieved through a special objective lens design, combined with a high brightness cold cathode field emission electron source.
For beam-sensitive samples, a new beam deceleration option allows resolution of just 1.4nm to be achieved at 1kV.
To make the most of these resolution capabilities, the S-4800 features redesigned specimen stages and a dry pumping system using a turbomolecular pump to avoid contamination.
The S-4800 has exceptional signal collection capabilities through enhanced EXB filter technology which has been introduced to collect and separate the various signals giving topographical and compositional information.
The new EXB filter brings four times greater collection efficiency for low angle backscattered electrons, ensuring the production of outstanding backscattered electron images even at accelerating voltages below 2kV.
There is a choice of two specimen stages that allow specimens up to 8in diameter to be accommodated.
All five axes on the larger stage are motorised and operate under graphical software control.
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