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Design and Development Software
News Release from: IMEC
Edited by the Electronicstalk Editorial
Team on 09 August 2001
IMEC names jolly good fellows
IMEC has nominated Karen Maex and Marc Heyns as IMEC Fellows for their exceptional scientific research in process technology, in which they are recognised worldwide as experts in their field.
IMEC has nominated Karen Maex and Marc Heyns as IMEC Fellows for their exceptional scientific research in process technology, in which they are recognised worldwide as experts in their field The IMEC Fellow nomination is granted to researchers at IMEC as appreciation for their scientific research that is internationally recognized
This article was originally published on Electronicstalk on 20 Feb 2002 at 8.00am (UK)
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From her PhD in Electrical Engineering in 1987 from the University of Leuven, Maex has spent her entire career doing pioneering research in silicides and interconnection technologies.
She has set up two successful industrial affiliation programmes on silicides and ultra-shallow junction technology and on Cu and low-k interconnection technologies, in which many companies are participating worldwide.
She has authored or been co-author of more than 250 publications in international journals and conference proceedings, and is co-inventor of 27 patents.
Currently, Maex is professor at the University of Leuven and Strategic Research Coordinator at IMEC to strengthen the fundaments of R and D activities in the fields of interconnect technologies and silicides, and advanced deposition and removal technologies.
Marc Heyns received his PhD in Electrical Engineering from the University of Leuven in 1986.
He is recognised worldwide as an expert in the fields of ultra-clean processing, environment, safety and health and high-k dielectrics.
He initiated the International Symposium on Ultra-Clean Processing of Silicon Surfaces, which has grown out as Europe's largest conference in this field, attracting more than 300 delegates from all over the world.
Heyns has authored or been co-author of more than 300 publications in international journals and conference proceedings, and is co-inventor of 22 patents.
In 1999 he received the SRC/SSA/International Sematech Excellence Award for Research in Manufacturing and ES and H, and in 2000 he was granted the Werner Kern award.
Currently director of IMEC's department in ultra-clean processing, high-k dielectrics, EPI and ES and H, Heyns has set up two successful industrial affiliation programs on ultra-clean processing and on high-k dielectrics.
The research activities in the high-k program have reached worldwide top level, proven by the extensive collaboration with International Sematech.
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