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Product category: ATE Systems
News Release from: Keithley Instruments | Subject: Model S400DC/RF ATE System
Edited by the Electronicstalk Editorial Team on 04 December 2001

Technology partnership creates novel RF
ATE

Keithley Instruments has entered into a technology partnership with Anritsu that provides technical and marketing support for each other's products used in semiconductor parametric testing.

Keithley Instruments has entered into a technology partnership with Anritsu that provides technical and marketing support for each other's products used in semiconductor parametric testing The first Keithley product resulting from this partnership is the Model S400DC/RF ATE system, the industry's first single-insertion RF and DC parametric test solution for wafer level process monitoring of communications devices and other high-speed digital devices

Anritsu's vector network analyser (VNA) solutions were selected because of their accuracy, self-calibration and ability to execute a variety of extremely fast measurements.

The end result of this partnership is a novel parametric test system that achieves up to a tenfold improvement in throughput and 70% reduction in test costs compared with rack-and-stack systems using separate DC and RF test operations.

"When we set out to develop an integrated solution for wafer-level monitoring of communications devices and other high-speed digital processes, we knew we would have to integrate advanced DC process monitoring measurements with innovative RF technology.

Anritsu offers the advanced RF measurement technology required to make the Model S400DC/RF a reality", said Michael Peters, Keithley's Semiconductor Business Manager.

"We are especially proud to be a part of a breakthrough solution that addresses the needs of the semiconductor marketplace.

Anritsu has long been a leader in VNA technology and the experience gained with our Lightning family of instruments has been incorporated in the Keithley S400DC/RF System.

These VNA products are excellent tools for RF testing on wafers", said Frank Tiernan, VP and General Manager, Anritsu Microwave Measurements Division.

Parametric ATE systems built on the combination of Keithley and Anritsu technology are designed for semiconductor fabs to help ensure reliable product designs and processes by measuring critical device parameters during development, characterisation, and production.

The DC and RF parameter extractions obtained with these systems are used for device modelling, process monitoring, and general analysis of complex signals up to 40GHz.

In addition to Anritsu VNAs, S400DC/RF test systems incorporate DC/RF probe card technology, Keithley's highly sensitive DC source-measure instruments, and RF switching matrixes.

The end product is an ATE system that characterises multiport devices over the DC to RF spectrum quickly and accurately.

Options include single device analysis up to either 20 or 40GHz, and multiple device testing up to 20GHz when Keithley's built-in RF switch is used.

Keithley calibrates the VNA, interconnects probe card adapter, probe card, and calibration substrate as a complete system to ensure the highest overall accuracy.

This high-speed (approximately 2min) system-level calibration process eliminates the need to recalibrate for changes in test frequency or the number of data points.

With greater confidence in measurement results, fabs are able to eliminate redundant probing and test costs. Request a free brochure from Keithley Instruments ...

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