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Product category: ATE Systems
News Release from: Keithley Instruments | Subject: Model S600DC/RF APT system
Edited by the Electronicstalk Editorial Team on 01 February 2002

Speedy parametric tester doesn't need
babysitting

Keithley Instruments has released what it claims to be the industry's fastest automated parametric test (APT) system for integrated DC and RF wafer measurements.

Keithley Instruments has released what it claims to be the industry's fastest automated parametric test (APT) system for integrated DC and RF wafer measurements The Model S600DC/RF APT system is a single-insertion DC/RF parametric test solution for probing communications and high speed digital devices at the wafer level

When used with a suitable test structure layout, the system can execute independent DC and RF tests in parallel on separate probes, greatly reducing the time and cost of testing on today's advanced devices.

This unique system incorporates the leading vector network analyser (VNA) and DC/RF probe card technology, supports "lights out" factory automation, and is compatible with both 200 and 300mm probers.

It allows single DUT testing up to 10GHz at rates up to ten times faster than typical rack-and-stack systems using separate DC and RF test operations.

Moreover, RF connections embedded on the test head and per-pin electronics eliminate manual setup and supply unequalled precision and repeatability.

The probe card loads in the same way that it does for DC operation and the system's RF capabilities can be accessed through a transparent interface, allowing greater ease of use.

The S600DC/RF was developed in coooperation with leading manufacturers of telecommunications components, and the industry's foremost suppliers of VNAs and DC/RF probe card systems.

By integrating Anritsu's self-calibrating VNAs and GGB Industries' probe cards tightly into the system, the S600DC/RF increases test throughput by an order of magnitude compared with rack-and-stack systems.

Unlike those systems, the S600DC/RF comes with a standard, well-supported test environment - the Keithley Test Environment (KTE).

Test results can be easily imported into a variety of popular device modelling packages, such as BSIMPro, IC-CAP, and UTMOST.

The S600DC/RF provides highly repeatable RF measurements of two-port/four-terminal power parameters (a1, a2, b1, and b2) that correlate well with results from other RF parametric test systems.

Its 1kHz frequency resolution makes it far easier to "dial in" the desired frequency than with typical rack-and-stack systems, which usually offer less resolution.

The S600DC/RF test environment provides general analysis of complex signals, and allows user-defined combinations of a1, a2, b1, and b2.

The KTE USERLIB macros calculate s-parameters and perform standard reductions of s-parameters to RF parameters.

These include maximum frequency, transit time vs.

current, base resistance of a bipolar transistor, and inductor quality, which are often used for process monitoring.

KTE adapts easily and economically to new processes and applications.

DC accuracy is not compromised by the addition of RF measurement circuitry, which can be the case with rack-and-stack systems.

The S600DC/RF's inherent DC precision is 1pA and 10uV.

The VNA, interconnects, probe card adapter, probe card, and calibration substrate are specified and calibrated as a complete system.

This helps eliminate the "babysitting" often required with finicky rack-and-stack systems, giving device modelling engineers and production test engineers more time for reliable data collection and analysis.

A SofTouch (Auto-Z) prober package ensures good electrical contact between the probe tips and device pads.

For improved data integrity, a burnishing algorithm supports automated cleaning of probe tips.

A high speed (approximately 2min) system-level measurement calibration process eliminates the need to recalibrate for changes in test frequency or the number of data points.

There is no need to pull the VNA out of the rack for calibration, and user-defined calibration techniques are supported.

With greater confidence in measurement results, fabs can eliminate redundant probing and test costs.

Keithley's Model S600DC/RF is available immediately as either an upgrade to an existing S600 System, or as a complete S600DC/RF APT System. Request a free brochure from Keithley Instruments ...

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