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Product category: IC and Hybrid Processing Equipment
News Release from: Keithley Instruments
Edited by the Electronicstalk Editorial Team on 17 April 2003

Pair collaborate on copper and low-k
integration

Note: A free brochure or catalogue is available from Keithley Instruments about its services. Click here to request a copy.

Keithley Instruments is working with Novellus Systems to develop electrical process diagnostic tests for copper and low-k integration.

Keithley Instruments is working with Novellus Systems to develop electrical process diagnostic tests for copper and low-k integration based on Keithley's S600 automatic DC parametric test platform These automated electrical tests will reduce copper process development time and result in improved product yields for Novellus' and Keithley's customers

The wireless and mobile communications industries are working rapidly to incorporate semiconductors based on new copper and low-k material designs due to their higher speed and lower power consumption benefits.

This is increasingly critical to the industry as semiconductor devices continue to get smaller and consume greater amounts of power.

"Design rule changes alone are no longer sufficient to scale circuit performance.

New materials are being introduced at an accelerated pace to keep up with increasing performance and power consumption demands", explains Keithley General Manager Mark Hoersten.

"The industry's move to copper and low-k materials presents new and significant measurement challenges during process development, process integration, and process control in volume production.

Our collaboration with Novellus, with its expertise in these new materials, will strengthen Keithley's ability to provide industry-leading electrical measurement solutions to our wireless IC customers around the world".

"In choosing Keithley's leading electrical test technology, Novellus will be able to more completely characterise the electrical performance of copper and low-k interconnect structures", said Bob Havemann, Novellus' vice president of process integration and applications.

"By so doing, we'll be able to develop more robust unit processes and attain critical knowledge that will help our customers integrate these unit processes in their customer-specific process sequences, thereby improving our customers' manufacturing yields". Request free introductory details about products from Keithley Instruments ...

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