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ATE Systems
News Release from: Keithley Instruments | Subject: S680DC/RF parametric test system
Edited by the Electronicstalk Editorial
Team on 09 December 2003
Higher throughput for wafer test
equipment
The S680DC/RF parametric test system is the latest addition to the Keithley Instruments S600 Series family.
The system allows control of 300mm wafer processes in 200mm test times with the new SimulTest parallel test software option for measuring up to nine devices simultaneously within a single probe touchdown Throughput is further enhanced with improved source-measure units (SMUs) that add faster, more flexible digital communications for easier parallel test programming
This article was originally published on Electronicstalk on 19 Jun 2008 at 8.00am (UK)
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These SMUs retain the ultralow current and high power capabilities of earlier units, and measurements correlate with S600 Series testers already in the field.
An enhanced AdapTest software option adds intelligence to the wafer testing process, allowing the S680DC/RF system to change test plans automatically in real time, based on die-level results.
When used with suitable test structures, the system's unique RF test features enable execution of simultaneous independent DC and RF tests up to 40GHs on separate probes.
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Its single-wire 300mm SECS/GEM automation is fully compliant with SEMI and GJG factory standards.
Its flexible architecture allows seamless integration of the automation capability into each fab's unique operations.
The S680DC/RF system software and hardware enhancements are also available as cost-effective field upgrades to existing S600 Series systems, which continues the platform's industry-leading capital equipment reuse across multiple technology generations.
Consequently, the system's extendable platform adapts easily to emerging measurement needs, like those associated with design rule reductions, new processes, new materials, and new devices.
S600 Series testers have always combined high throughput with superior measurement integrity and broad testing flexibility.
The S680 DC/RF System hardware and software upgrades advance these capabilities with features that further increase measurement speed and decrease COT at a fraction of the cost to purchase a completely new system.
These systems continue to drive down the cost of test over time by maximising equipment and test program reuse as test requirements change and by helping simplify the transition to new materials and devices.
A clear upgrade path is already identified for the next two semiconductor technology nodes.
As the S680DC/RF system shares a common software structure with all other S600 Series testers, it also minimises engineer and operator training when adding new testers.
To create the S680DC/RF system, Keithley improved the S600 Series source-measure unit (SMU) with faster, more flexible digital communications to simplify programming for parallel test.
The per-pin electronics design of all S600 Series systems enhances measurement sensitivity by minimising the parasitic capacitance and leakage currents that hamper the performance of competitive testers.
Unlike other testers, the S680DC/RF system has identical, high-resolution DC measurement paths for all tester pins (up to 64), so it's the only parametric tester that provides 100aA and 100nV measurement resolution for all device measurements.
The 40GHs test option of the S680DC/RF system allows accurate characterisation of equivalent (electrical) thickness of ultrathin gate dielectrics, revealing structure subtleties that might not have been seen previously.
It also provides production s-parameter measurements for process control of high performance BiCMOS processes.
By supplying consistently accurate measurements on these and other semiconductor devices, the S680DC/RF system will cut down on rework and re-probes to verify readings-users get the right results the first time and lower test costs.
The upgraded Keithley Test Environment Software, KTE 5.1.0, delivers customer- and field-requested enhancements and improvements added since the last general release of KTE.
The KTE core and its many options deliver the highest data integrity with minimum test time, while minimising misprocessed material.
Test results can be easily imported into a variety of popular device modelling packages, such as BSIMProT, IC-CAP, and UTMOSTT.
KTE's test setup, execution engine, and data analysis interfaces have consistently proven to be the easiest to use of all parametric test systems.
Test throughput can be further enhanced with the optional KTE AdapTest software module that adds intelligence to the wafer testing process.
This module allows the S680DC/RF System to change test plans automatically in real time, based on die-level results, eliminating the measurement of noncritical parameters on good wafers.
AdapTest is ideal for handling scenarios like automated first-level process diagnostics when unexpected results are obtained, and for re-measuring a previous known-good site.
This option also allows automated electrical verification of good probe-to-pad contact, including probe tip cleaning as needed.
The S680DC/RF system delivers a complete operational model that's fully integrated with a fab's overall automation environment, including test recipe version control and automatic fanout, with ISO9001 traceability for recipes.
Additional instrument options are available for specific test needs, including remote testhead pre-amps, C-V meters, pulse generators, LCR meters, frequency counters, and spectrum analysers.
This flexibility allows the system to be used for silicon and III-V wafer devices, RF-BiCMOS analogue processes, the latest low leakage devices, advanced memory devices, new materials, and testing driven by lower noise margins needed in wireless communication ICs.
The S680DC/RF system is shipping now. Request a free brochure from Keithley Instruments ...
(Updated by CR, May 2007).
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