Product category:
IC and Hybrid Processing Equipment
News Release from: Micralyne
Edited by the Electronicstalk Editorial
Team on 06 August 2004
Silicon etcher expands MEMS capabilities
MEMS manufacturer Micralyne has completed the installation of an AMS 200 silicon etcher from Alcatel Micro Machining Systems.
MEMS manufacturer Micralyne has completed the installation of an AMS 200 silicon etcher from Alcatel Micro Machining Systems Micralyne, which manufactures high quality MEMS products for the transportation, communications, life sciences and other industries, is using the AMS 200 system for a wide range of applications including telecomms optical systems, drug delivery systems and key components for commercial printers
This article was originally published on Electronicstalk on 8 Nov 2004 at 8.00am (UK)
Related stories
EMS solutions to be introduced in Munich
IMI or Integrated Microelectronics will showcase its complete solutions in electronica 2004 Trade Show from 09 to 12 November in New Munich Trade Fair Centre in Germany.
Power semiconductor materials focus of trade show
At the 37th International Symposium on Microelectronics November 16-18, 2004, Indiumıs exhibit will focus on Power Semiconductor Materials, such as Solder Wire, Solder Preforms and Solder Paste.
In evaluating the available DRIE tools, the Alcatel AMS 200 stood out among other available tools for its volume capabilities, precise control, high etch rates and cost-effectiveness.
"Many of our customers are beginning to ramp up their product volumes and we are responding by investing in dedicated production tools to meet these demands".
"We looked to purchase an additional DRIE tool that allowed us to maintain our high quality standards while meeting our significant volume needs", said Chris Lumb, President and CEO of Micralyne.
Further reading
Funds enable transition to copper interconnects
The Scottish microelectronics industry's leading-edge IC 'microsurgery unit' has received funds to enable it to introduce state of the art techniques that will make the facility unique in Europe.
Fisher steps up to group role
TT Electronics has appointed Dean Fisher as Business Development Director for its automotive sensors and systems division with immediate effect.
"We are already impressed with the results we have seen from these initial weeks after a very rapid commissioning period".
"We now have the AMS 200 working in multiple shifts to fulfil current customer demands and initiate new projects", he concluded.
"We are very pleased to be the DRIE supplier of choice to a MEMS manufacturing leader such as Micralyne", said Jean-Marc Gruffat, Director of Sales and Marketing for Alcatel Micro Machining Systems product group.
"This installation contributes greatly to our strategy to continue bringing real benefit to our customers in the MEMS community around the globe".
"We consider Micralyne's purchase of our AMS 200 system the beginning of a growing partnership as Micralyne continues to increase its manufacturing capacity".
The Alcatel AMS 200 deep silicon etcher is specifically designed to deliver superior etch performances to meet challenging requirements, including very high etch rate (better than 20um/min), high mask selectivity, excellent etch uniformity and profile controls.
The Alcatel patented ICP "I-Speeder" source is configured to offer perfectly stable and repeatable processes over 24h full operation time.
Its compatibility with Class 10 clean room environments, its easy maintenance access as well as its very small footprint makes the system particularly appropriate for a MEMS production line.
Along with this addition of a DRIE tool, Micralyne has also made other recent capital investments such as a Karl Suss mask aligner (MA6/BA6), a second E-beam evaporation system and optical testing and metrology equipment.
• Micralyne: contact details and other news
• Email this article to a colleague
• Register for the free Electronicstalk email newsletter
• Electronicstalk Home Page
Search the Pro-Talk network of sites
