Product category:
IC and Hybrid Processing Equipment
News Release from: Oxford Instruments Plasma Technology
Edited by the Electronicstalk Editorial
Team on 20 December 2007
Process tool systems ordered for
research complex
Nine systems will provide University of Southampton with leading-edge capabilities in the research and development of novel nanoelectronic, MEMS and photonic devices.
Oxford Instruments has won an order for nine process tool systems, worth a total in excess of GBP 2.5 million, to equip a new cleanroom facility at the University of Southampton, UK The new Mountbatten research complex will serve the world-leading research of the School of Electronics and Computer Science and the Optoelectronics Research Centre
This article was originally published on Electronicstalk on 13 Nov 2006 at 8.00am (UK)
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Completion of the new building is expected during summer 2008, when the Oxford Instruments tools will be sited within it.
The nine systems will provide the university with leading-edge capabilities in the research and development of novel nanoelectronic, MEMS and photonic devices.
The order includes both plasma etch and deposition tools, with two PlasmalabSystem100 ICP etch tools, two Plasmalab80Plus open-loading RIE tools and two PlasmalabSystem100 PECVD tools, plus a number of Oxford Instruments' newest products: a FlexAL plasma/thermal atomic layer deposition (ALD) tool, a Nanofab nanowire and nanotube growth tool, and a large-chamber Ionfab ion beam system.
Oxford Instruments had already supplied the Optoelectronics Research Centre with three systems in 2006 and 2007, in a GBP 1.2 million order.
Andy Matthews, Managing Director of Oxford Instruments Plasma Technology, comments: "We are extremely proud to have been awarded this order by the University of Southampton and to be able to further our relationship with the university".
"This is a very significant order for us, not only commercially, but also as an endorsement of Oxford Instruments' position at the forefront of providing high quality, innovative process tools which are enabling the next generation of electronic and nanotechnology devices".
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