Product category:
IC and Hybrid Processing Equipment
News Release from: Powerlase
Edited by the Electronicstalk Editorial
Team on 29 September 2006
Lasers to develop new EUV sources
Powerlase has received an order for its innovative Starlase lasers from the Extreme Ultraviolet Lithography System Development Association (EUVA).
Powerlase has received an order for its innovative Starlase lasers from the Extreme Ultraviolet Lithography System Development Association (EUVA) The lasers will be used to further the research and development specialist's findings in the field of extreme ultraviolet (EUV) sources
This article was originally published on Electronicstalk on 21 Jul 2006 at 8.00am (UK)
Related stories
Diode pumped acousto-optic switched laser
The Starlase A08 diode pumped acousto-optic switched laser has proven highly successful in a diverse range of applications, particularly the plasma display panels (PDP) industry
EUV lithography is now the most promising technology for producing semiconductors of 32nmhp and below.
The EUVA will use the Powerlase lasers to develop new EUV sources for lithography steppers, which are to be used in semiconductor chip fabrication research, by generating 13.5nm extreme ultraviolet (EUV) radiation as a source.
POWERLASE Starlase lasers has been selected as a research instrument to produce the high power, high-repetition laser, necessary to produce best-in-class results.
Samir Ellwi, Powerlase Vice President Strategic Innovations concludes; "We are very pleased EUVA has chosen our lasers to fulfil its research needs".
"We have worked very hard and we will continue to make sure that EUVA future requirements are met".
"The deal also demonstrates our continued expansion into the Asian market".
The deal follows a recent purchase of AO2/G lasers by the National Institute of Advanced Industrial Science (AIST) in Japan and a distribution agreement with the Japan Laser Corporation, which allows the promotion of the entire AO Starlase range.
• Powerlase: contact details and other news
• Email this article to a colleague
• Register for the free Electronicstalk email newsletter
• Electronicstalk Home Page
Search the Pro-Talk network of sites
