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    <title>RSS News Feed for Surface Technology Systems - from Electronicstalk</title>
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    <description>Surface Technology Systems news releases on Electronicstalk</description>
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    <copyright>Copyright (C)2008 Pro-Talk Ltd. All rights reserved.</copyright>
    <pubDate>Mon, 18 Aug 2008 08:00:00 UT</pubDate>
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      <title>Module advances chemical vapour etching</title>
      <description>Breakthrough chamber design and improved wafer handling makes XeF2 a viable process for high volume production.</description>
      <pubDate>Mon, 04 Aug 2008 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf120.html</link>
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      <title>Plasma processing systems for the Ivy League</title>
      <description>Inductively coupled plasma and plasma enhanced vapor deposition tools to be installed at Harvard University's Center for Nanoscale Systems.</description>
      <pubDate>Fri, 06 Jul 2007 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf119.html</link>
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    <item>
      <title>German researchers adopt deep DRIE source</title>
      <description>Surface Technology Systems has won an EU tender for an MPX Pegasus system from the Fraunhofer-Institut fur Zuverlassigkeit und Mikrointegration (IZM).</description>
      <pubDate>Tue, 23 Jan 2007 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf118.html</link>
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    <item>
      <title>Johnson steps up to board appointment</title>
      <description>Dr Robin Johnson has agreed to join the board of STS as Chief Operating Officer.</description>
      <pubDate>Mon, 20 Nov 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf117.html</link>
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      <title>Plasma source suits larger wafers</title>
      <description>Deep reactive ion etch plasma source is compatible with 300mm silicon wafers commonly used in the large scale manufacturing of silicon-based integrated circuits.</description>
      <pubDate>Thu, 14 Sep 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf116.html</link>
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    <item>
      <title>New COO for Surface technology systems</title>
      <description>Surface technology systems appoints Dr Robin Johnson as Chief Operating Officer</description>
      <pubDate>Fri, 28 Jul 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf115.html</link>
    </item>
    <item>
      <title>Alliance addresses different etching needs</title>
      <description>Xactix and Surface Technology Systems are planning to unveil a comprehensive line of production-oriented release etching tools for MEMS.</description>
      <pubDate>Fri, 21 Jul 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf113.html</link>
    </item>
    <item>
      <title>Xenon difluoride silicon etch systems</title>
      <description>Xactix and STS unveil comprehensive line of production-oriented xenon difluoride silicon etch systems</description>
      <pubDate>Wed, 12 Jul 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf114.html</link>
    </item>
    <item>
      <title>Austriamicrosystems adopts DRIE system</title>
      <description>Austriamicrosystems has purchased a VPX Pegasus deep reactive ion etch (DRIE) system for advanced IC production.</description>
      <pubDate>Mon, 03 Jul 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf112.html</link>
    </item>
    <item>
      <title>MEMS foundry orders first cluster tool</title>
      <description>Surface Technology Systems has received its first order for a VPX cluster tool with a Pegasus deep reactive ion etch (DRIE) process module, from Dalsa Semiconductor.</description>
      <pubDate>Thu, 06 Apr 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf111.html</link>
    </item>
    <item>
      <title>Micromachining contract boosts bulging order book</title>
      <description>Surface Technology Systems has received an order worth over GBP 2 million from a major manufacturer for microelectromechanical systems production equipment.</description>
      <pubDate>Wed, 29 Mar 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf110.html</link>
    </item>
    <item>
      <title>Repeat orders testify to processing performance</title>
      <description>In recent weeks Surface Technology Systems has received multiple orders worth more than GBP 1 million for its cluster tools from a leading supplier of components for wireless communications.</description>
      <pubDate>Wed, 15 Mar 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf109.html</link>
    </item>
    <item>
      <title>New role for Rees</title>
      <description>Surface Technology Systems has appointed Richard Rees as Company Secretary.</description>
      <pubDate>Mon, 20 Feb 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf108.html</link>
    </item>
    <item>
      <title>Process platform suits pilot production</title>
      <description>The VPX platform that enables up to three process chambers to share a low-cost, common wafer-transport system.</description>
      <pubDate>Tue, 24 Jan 2006 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf107.html</link>
    </item>
    <item>
      <title>Platform accelerates wafer throughput</title>
      <description>The CPX cluster platform enables multiple process chambers to share a common wafer transport system.</description>
      <pubDate>Mon, 12 Sep 2005 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf106.html</link>
    </item>
    <item>
      <title>Saunders takes top job</title>
      <description>Surface Technology Systems has appointed John Saunders as Chief Executive Officer.</description>
      <pubDate>Thu, 25 Aug 2005 08:00:00 UT</pubDate>
      <category>Surface Technology Systems</category>
      <link>http://www.electronicstalk.com/news/srf/srf105.html</link>
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