Product category:
IC and Hybrid Processing Equipment
News Release from: Surface Technology Systems
Edited by the Electronicstalk Editorial
Team on 19 August 2005
Bosch orders deep reactive ion etch
system
Surface Technology Systems has received an order for its new Pegasus deep reactive ion etch system from leading automotive MEMS device manufacturer Robert Bosch.
Surface Technology Systems has received an order for its new Pegasus deep reactive ion etch system from leading automotive MEMS device manufacturer Robert Bosch The order from Bosch strengthens STS' long-standing relationship with the German company, and is the fifth such order since Pegasus was launched on 28th June 2005
This article was originally published on Electronicstalk on 23 Jul 2004 at 8.00am (UK)
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The Pegasus system will be installed at Bosch's MEMS wafer fab in Reutlingen, Germany.
It will be used in a number of research and development projects to develop new MEMS devices.
The flexibility of the STS software with direct manual control of the system enables manufacturers such as Bosch to fully optimise their individual processes, ensuring product quality and high yield.
In the MEMS market, where device designs often differ significantly from one manufacturer to another, STS believes its equipment has the capability to meet the demands of a wide range of customers - from "blue-sky" researchers to high volume manufacturers such as Bosch.
In addition to the process advantages offered by the Pegasus technology, a key factor in gaining this latest order from Bosch was STS' commitment to providing outstanding customer support and service within the German territory.
Earlier this year STS strengthened its team at the German Sales Office in Ulm with the recent appointment of a Regional Customer Support Manager, who will work closely with customers in the region.
"The order from Bosch for the Pegasus system is significant news for STS", said Mutsuo Mukuda, Vice Chairman of STS.
"Not only have we placed Pegasus with one of our largest and most prestigious European clients, but the sale also reinforces the belief that we have in Pegasus".
"The range of enhancements and developments that Pegasus brings to the MEMS market, such as the high uniformity plasma source, result in higher etch rates and improved etch uniformity, leading to higher throughput and device yield".
"We fully expect Pegasus to gain further traction in the MEMS market".
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