Micromachining contract boosts bulging order book

Surface Technology Systems has received an order worth over GBP 2 million from a major manufacturer for microelectromechanical systems production equipment.

Surface Technology Systems has received an order worth over GBP 2 million from a major manufacturer for microelectromechanical systems (MEMS) production equipment.

The order includes multiple Pegasus processing chambers for deep silicon micromachining of MEMS for use in consumer end products.

The Pegasus source offers significantly higher silicon etch rates than other deep reactive ion etch (DRIE) tools currently on the market.

STS offers a choice of two cluster platforms for multiple chamber operation: the VPX, which is supplied with one vacuum cassette and up to three process chambers, and the CPX which has two vacuum cassettes and up to four process chambers.

John Saunders, CEO of STS said: "We are very excited by this order, as not only is it one of the largest orders STS has won recently, but it underlines the success of this relatively new product which was launched eight months ago".

"We feel it also verifies the capability of our new cluster systems to satisfy the requirements of production customers".

David Haynes, STS' Sales and Marketing Director added: "We see this order as further proof that the major MEMS manufacturers are successfully using or selling their devices for high volume applications such as automotive or consumer products".

This new order increases STS's current order book to over GBP 12.1 million, all of it for delivery in 2006, much of it in the first half.

This is the highest level of order book STS has had since 2001.

Back to top