Product category:
IC and Hybrid Processing Equipment
News Release from: Surface Technology Systems
Edited by the Electronicstalk Editorial
Team on 06 July 2007
Plasma processing systems for the Ivy
League
Inductively coupled plasma and plasma enhanced vapor deposition tools to be installed at Harvard University's Center for Nanoscale Systems.
Surface Technology Systems has sold two plasma processing systems to Harvard University, one of the prestigious "Ivy League" institutions in Northeastern USA The inductively coupled plasma (ICP) and plasma enhanced vapor deposition (PECVD) tools will be installed within the University's Center for Nanoscale Systems
This article was originally published on Electronicstalk on 14 Sep 2006 at 8.00am (UK)
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The Center for Nanoscale Systems (CNS) is a part of Harvard University's Faculty of Arts and Sciences, and focuses on how nanoscale components can be integrated into large and complex interacting systems.
CNS is also a member of the National Science Foundation's National Nanotechnology Infrastructure Network (NNIN) initiative to create a national network of world-class facilities available to all researchers.
Dr Eric Martin, Technical Director of the CNS at Harvard says: "Our centre is enthusiastic about working together with STS to meet the very demanding needs of leading-edge nanoscience being conducted at our facility".
"CNS operates on a shared-resource basis and serves hundreds of users per year".
"In STS we have found a partner who understands the importance of responding quickly to changing process requirements and emerging areas of materials processing".
Andrew Tucker, General Manager and VP of Sales, of ST Systems (USA), adds: "We are very proud to receive this order from such an internationally renowned university".
"These are the first tools we have sold to Harvard, and are pleased to add another key university research facility with multiple tools to our customer base".
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