Multichannel driver aids MEMS testing

The Model 9070 is a high-voltage, multichannel, totally integrated system for driving rotating MEMS microengines.

The Model 9070 is a high-voltage, multichannel, totally integrated system for driving rotating MEMS microengines.

The 9070 is a highly stable signal source that provides the necessary waveforms and instrument controls to drive MEMS devices with maximum reliability.

A typical system consists of Super uDriver software (distributed by Tegam under licence from Sandia National Laboratories), one 2375 MEMS driver amplifier providing four flexible output channels, and two 2414A-GS waveform generators.

These true arbitrary waveform generators include built-in sequencers and programmable synchronous outputs, which are ideal for driving mechanisms that require complex drive signals or for use in instances where external hardware must be triggered for collection of characterisation data.

Variations on the basic 9070 system can be attained by upgrading or changing its modular components, making the 9070 a tremendously versatile tool for scientists involved in MEMS testing.

This groundbreaking product enters the industry just as MEMS is creeping to the forefront of emerging technology.

The 9070 fulfils the need for characterisation, dynamic performance evaluation, and all phases of reliability assessment for orthogonal comb drives, cantilevered beams, and other electrostatically controlled MEMS devices and actuators.

Thanks to its unique combination of specialised wave creation software, precise signal generators, and high voltage amplifiers, the flexibility and accuracy of the 9070 is unmatched by any other solution in the field.

US pricing for the 9070 starts at $14,975.

"With its unique combination of hardware and software, the 9070 allows the user to concentrate on designing the test, rather than spending limited resources designing the test stand", comments Terry Gambill, President of Tegam.

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