Product category:
IC and Hybrid Processing Equipment
News Release from: Vistec Semiconductor Systems | Subject: INS300 and INS3300
Edited by the Electronicstalk Editorial
Team on 03 January 2007
Inspection systems aid leading-edge IC
research
IMEC, the leading European 300mm process development centre in Leuven/Belgium, uses Vistec INS300 and INS3300 inspection and review systems in its advanced IC manufacturing research and pilot line.
IMEC, the leading European 300mm process development centre in Leuven/Belgium, uses Vistec INS300 and INS3300 inspection and review systems in its advanced IC manufacturing research and pilot line IMEC is a world-leading nanoelectronics research and development centre
This article was originally published on Electronicstalk on 13 Mar 2007 at 8.00am (UK)
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The Vistec INS300 and Vistec INS3300 are installed in the advanced 300mm manufacturing line in FEOL and BEOL.
"Overall performance and reliability of Vistec's INS systems convinced IMEC", stated Vistec's General Manager Gerhard Ruppik.
High performance optics being a key competency of Vistec was a decisive factor for IMEC to choose the INS systems.
The capability of optical systems is one reason for IMEC to still use them when developing advanced process technologies below 45nm node and nanotechnology.
"Optical systems offering high performance will remain indispensable in tomorrow's technology", emphasised Ruppik.
The cost effective INS300 and the high performance INS3300 offer outstanding optical solutions for strained silicon characterisation, and advanced copper/low-k applications in combination with high throughput and extreme reliability.
Therefore, the INS systems fit perfectly in today's 300mm manufacturing environments in view of ultra-cleanliness, automation and cost of ownership.
Applications exist throughout the life-cycle of IC manufacturing, starting with development, pilot production, ramp-up phase, process control in high volume manufacturing and yield improvement.
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