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Product category: IC and Hybrid Processing Equipment
News Release from: Vistec Semiconductor Systems
Edited by the Electronicstalk Editorial Team on 23 January 2007

European MEMS maker sees more with IR
inspection

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Vistec Semiconductor Systems has delivered two INM100 IR infra-red inspection systems to a European MEMS manufacturer.

Vistec Semiconductor Systems has delivered two INM100 IR infra-red inspection systems to a European MEMS manufacturer The customer will use one system each for production and defect analysis

Infra-red microscopes offer the opportunity to see through silicon layers.

The high transparency of silicon in infra-red light permits the detection of defects, which are not visible by any other illumination method.

"Therefore, the usage of the INM100R is predestined for the MEMS production, especially when it comes to the inspection of silicon-embedded structures", says Product Manager Andreas Machura.

"We provide the customer an inspection system, developed and built with focus on the diversified customer's demands".

The INM100 IR features IR optimised illumination and optics.

"But the system doesn't only provide best results in the infra-red spectrum".

"It can be operated as a conventional microscope, too, which increases the value for the customer", adds Machura.

The INM100 IR can also be used to control the quality of the overlay of flip chip and wafer level packaging technologies.

The MEMS manufacturer made its decision to order two INM100 IR systems following an on-site evaluation of Vistec microscopes.

"The customer was convinced by the combined VIS and IR illumination, which can be used for surface and see-through inspections", explains Vistec's General Manager Gerhard Ruppik.

"Another decisive factor for the order of the INM100 IR systems was the excellent infra-red optics".

"High performance optics are a core competence of Vistec and we can revert to a long experience in developing optical inspection systems".

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